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As mentioned above, check the ECU for leaky capacitors. It seems like there is about one post a month of a car running erratically and its seems like a good amount of those posts end up with a picture of a capacitor taking a dump on the ECU.
 

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You can always hook up a multimeter to the output voltage on the MAF and see how steady the voltage is..... if the idle voltage is erratic, it could be a maf issue. If the voltage is too low, it could indicate a vacuum leak, etc... im sure if dig enough, you can find a voltage output vs flow to get an idea of what voltage should be like 0.5 volt at 800 RPMs....
 
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